ELET 6014 - Microelectromechanical Systems
This course will provide an opportunity for the student to become familiar with the technology and applications of microelectromechanical systems. This is one of the fastest growing areas in the semiconductor business. Today's applications include accelerometers for air bag deployment, pressure sensors, flow sensors, optical systems and micromotors. Emphasis is on the different technologies compared to the standard semiconductor processing technologies. The lecture provides necessary understanding of the various process technologies used to fabricate MEMS devices. The Laboratory allows the students to design a MEMS device, design a process to fabricate the device and make and test a MEMS device.